Detection and Pattern Recognition of Chemical Warfare Agents by MOS-Based MEMS Gas Sensor Array.

ABSTRACT: Chemical warfare agents (CWAs), including hydrogen cyanide (AC), 2-[fluoro(methyl)phosphoryl]oxypropane (GB), 3-[fluoro(methyl)phosphoryl]oxy-2,2-dimethylbutane (GD), ethyl S-(2-diisopropylaminoethyl) methylphosphonothioate (VX), and di-2-chloroethyl sulfide (HD), pose a great threat to public safety; therefore, it is important to develop sensing technology for CWAs. Herein, a sensor array consisting of 24 metal oxide semiconductor (MOS)-based MEMS sensors with good gas sensing performance, a simple device structure (0.9 mm × 0.9 mm), and low power consumption (<10 mW on average) was developed. The experimental results show that there are always several sensors among the 24 sensors that show good sensing performance in relation to each CWA, such as a relatively significant response, a broa

SUBMITTER: Xu M 

PROVIDER: S-EPMC12030887 | biostudies-literature | 2025 Apr

REPOSITORIES: biostudies-literature