Ultra-sensitive micro thermoelectric device for energy harvesting and ultra-low airflow detection.

ABSTRACT: Micro thermoelectric device (μ-TED) emerges with great attention in energy generation, thermal management, and heat sensing applications. However, the large sensitive area is necessary to accommodate enough thermoelectric couples (TCs) for a high thermoelectric performance. This limits the potential in micro energy harvesting and ultra-sensitive sensing applications. Here, we adopted an optimized MEMS-based process to fabricate the ultra-sensitive micro-thermoelectric device (μ-TED). With the help of MEMS-compatible electrochemical deposition, the small size (25 μm), high aspect ratio (1:1.25), and alternating distributed P/N structures are achieved. As a result, the μ-TED realizes an ultra-high integration density of 19,900 thermoelectric couples per cm². Moreover, it shows a g

SUBMITTER: Yan B 

PROVIDER: S-EPMC12034818 | biostudies-literature | 2025 Apr

REPOSITORIES: biostudies-literature