Acid-modified Cu-Ce/HZSM-5 adsorbent removes trace phosphorus impurities from recycled hydrogen during polysilicon production.

ABSTRACT: In this study, an acid-modified Cu-Ce/HZSM-5 bimetallic adsorbent was developed for the removal of trace PH₃ impurities from simulated recycled hydrogen in a chemical vapor deposition furnace for polysilicon production. A systematic examination was subsequently conducted to examine the effects of acidic substance type and concentration, and the addition of Ce on the adsorbent's ability to remove PH₃. The results showed that the adsorbent, when treated with 13% HNO₃ and an appropriate level of Ce (n _Ce : n _Cu = 1 : 40), exhibited superior adsorption performance, achieving a PH₃ breakthrough adsorption capacity of 135.2 mg g^-1. After three regeneration cycles, the sorbent achieved optimal performance.

SUBMITTER: Liu Z 

PROVIDER: S-EPMC12038689 | biostudies-literature | 2025 Apr

REPOSITORIES: biostudies-literature