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Electrical Behavior of Combinatorial Thin-Film Zr<sub>x</sub>Ta<sub>1-x</sub>O<sub>y</sub>.


ABSTRACT: Combinatorial magnetron sputtering and electrical characterization were used to systematically study the impact of compositional changes in the resistive switching of transition metal oxides, specifically the ZrxTa1-xOy system. Current-voltage behavior across a range of temperatures provided insights into the mechanisms that contribute to differences in the electrical conductivity of the pristine Ta2O5 and ZrO2, and mixed ZrxTa1-xOy devices. The underlying conductive mechanism was found to be a mixture of charge trapping and ionic motion, where charge trapping/emission dictated the short-term cycling behavior while ion motion contributed to changes in the conduction with increased cycling num

SUBMITTER: Flynn-Hepford M 

PROVIDER: S-EPMC12114200 | biostudies-literature | 2025 May

REPOSITORIES: biostudies-literature