Full Wafer Scale Manufacturing of Directly Printed TiO₂ Metalenses at Visible Wavelengths with Outstanding Focusing Efficiencies.

ABSTRACT: Highly efficient metalens arrays designed for 550 nm are directly printed using UV-assisted nanoimprint lithography (UV-NIL) and a TiO₂ nanoparticle (NP)-based ink on 8″ optical wafers with imprint times less than 5 min. Approximately one-thousand 4-mm metalenses are fabricated per wafer with uniform optical performance using a reusable PDMS-based elastomeric stamp. The absolute and relative focusing efficiencies are as high as 81.2% and 90.4%, respectively, matching closely with the simulated maximum efficiencies of 83% and 91% achievable with the given master design, indicating that future improvements are possible, and efficiencies are not limited by materials or process. The imprinted metalenses are free from organics due to a post-imprint calcination step and exhibit outsta

SUBMITTER: Jung DE 

PROVIDER: S-EPMC12306388 | biostudies-literature | 2025 Jul

REPOSITORIES: biostudies-literature