Smart resonant micro-sensor and micro-actuator: high-performance, wide range bi-axial magnetic sensitive/ insensitive micro-device for multifunctional sensing applications.

ABSTRACT: With the rapid development of intelligent and autonomous systems, such as wearable health monitoring and advanced manufacturing robots, there is a growing demand for the development of advanced, miniaturized smart sensors and actuator systems. In this context, a single microdevice with hybrid functionality as both a sensor and actuator demonstrates excellent performance across diverse applications, holds significant promise. Herein, we present a proof-of-concept for a high-performance bi-directional Lorentz force magnetometer and actuator, implemented within a single microelectromechanical system (MEMS) device. Moreover, the device demonstrates insensitivity to magnetic fields, making it highly suitable for applications that require anti-crossing behavior in magnetic environments. The desi

SUBMITTER: Amara H 

PROVIDER: S-EPMC12443953 | biostudies-literature | 2025 Sep

REPOSITORIES: biostudies-literature