Structure-in-Void Quasi-Bound State in the Continuum Metasurface for Deeply Subwavelength Nanostructure Metrology.

ABSTRACT: Fano lineshapes associated with quasi bound-state-in-the-continuum resonances, that are supported by dielectric metasurfaces, have the advantageous properties of being extremely sensitive to minute geometrical changes in the meta-atoms. We show an approach to determine deep subwavelength feature sizes, comparable to semiconductor critical dimension metrology, by structurally infilling a void of a dielectric disk-hole metasurface design. Our simulated results show a sensitivity of 40.5 nm resonant wavelength shift for a 1 nm feature width (i.e., critical dimension) change, at an optical line width of 1.8 nm. We present both experimental and simulated results of different void infillings and attribute the spectral change of the resonance to the sensitivity to an effective index in the void o

SUBMITTER: Bijloo F 

PROVIDER: S-EPMC12444989 | biostudies-literature | 2025 Sep

REPOSITORIES: biostudies-literature