Tailoring CuO_x Films via Open-Air Spatial Atomic Layer Deposition and Their Application in Room-Temperature Humidity Sensing.

ABSTRACT: This study demonstrates the tunability of copper oxide (CuO_x) thin films synthesized using open-air atmospheric-pressure spatial atomic layer deposition (AP-SALD). By systematically varying the deposition temperature and copper precursor flow rate, as well as introducing nitrogen doping through in situ oxidant switching (from H₂O to ammonium hydroxide (NH₄OH)), the crystallinity, oxidation state, chemical composition, carrier concentration, and resistivity of CuO_x films are modulated. Under optimized conditions, CuO_x films achieve a very low resistivity of 0.178 Ω·cm and a high carrier concentration of 10¹⁹ cm^{- 3}-among the best reported for AP-SALD-deposited CuO_x. As proof of properties tailo

SUBMITTER: Shahin A 

PROVIDER: S-EPMC12462605 | biostudies-literature | 2025 Sep

REPOSITORIES: biostudies-literature