Giant Modulation of Microstructure and Ferroelectric/Piezoelectric Responses in Pb(Zr,Ti)O₃ Ultrathin Films via Single-Pulse Femtosecond Laser.

ABSTRACT: Ferroelectric oxides, such as Pb(Zr,Ti)O₃ (PZT), have been shown to maintain stable ferroelectricity even in ultrathin film configurations. However, achieving controllable modulation of microstructure and physical responses in these ultrathin films remains challenging, limiting their potential applications in modern nanoelectronics and optoelectronics. Here, we propose a single-pulse femtosecond (fs) laser micromachining technique for high-precision engineering of microstructure and ferroelectric/piezoelectric responses in ultrathin PZT films. The results show that various microstructures can be selectively fabricated through precise control of fs laser fluence. Specifically, nano-concave arrays are formed via low-fluence laser irradiation, which is mainly attributed to the fs l

SUBMITTER: Wang B 

PROVIDER: S-EPMC12472458 | biostudies-literature | 2025 Sep

REPOSITORIES: biostudies-literature