Dual-Step Chemical Treatment of Wafer-Scale Metal-Organic Chemical Vapor Deposition Grown Monolayer Molybdenum Disulfides.

ABSTRACT: Two-dimensional (2D) transition metal dichalcogenides (TMDs) possess distinct optical and electronic properties, making them promising candidates for optoelectronic applications. Recently, major advances in the wafer-scale growth of TMDs using the metal-organic chemical vapor deposition (MOCVD) have enabled their integration with standard electronics. However, such materials continue to suffer from defects and unwanted doping, which lower semiconductor performance, as exemplified by poor photoluminescence (PL) yield. Chemical treatment protocols have been shown to improve the PL yield in exfoliated and CVD-grown materials. Here, using PL, Raman microscopy, X-ray photoemission spectroscopy (XPS) and density functional theory (DFT) calculations, we develop chemical treatment protocols for wa

SUBMITTER: Lim J 

PROVIDER: S-EPMC12509315 | biostudies-literature | 2025 Oct

REPOSITORIES: biostudies-literature