Homogeneous Free-Standing Nanostructures from Bulk Diamond over Millimeter Scales for Quantum Technologies.

ABSTRACT: Quantum devices based on optically addressable spin qubits in diamond are promising platforms for quantum technologies such as quantum sensing and communication. Nano- and microstructuring of the diamond crystal is essential to enhance device performance, yet fabrication remains challenging and often involves trade-offs in surface quality, aspect ratio, device size, and uniformity. We tackle this hurdle with an approach producing millimeter-scale, thin (down to 70 nm), and highly parallel (< 0.35 nm/μm) membranes from single-crystal diamond. The membranes remain contamination free and possess atomically smooth surfaces (R_q <  200 pm) as required by state-of-the-art quantum applications. We demonstrate the benefits and versatility of our method by fabricating large fields of free

SUBMITTER: Corazza A 

PROVIDER: S-EPMC12512176 | biostudies-literature | 2025 Oct

REPOSITORIES: biostudies-literature