Sub-angstrom resolution ptychography in a scanning electron microscope at 20 keV.

ABSTRACT: Achieving sub-ångström (<1 Å) resolution in electron microscopy typically requires a high-energy (>30 keV) beam and a transmission electron microscope (TEM) fitted with an aberration corrector and a high efficiency, high pixel-count camera. The cost, space- and personnel-requirements of such TEMs is prohibitive for many laboratories. Low-energy (≤30 keV) scanning electron microscopes (SEMs), in comparison, offer a simpler, more compact, and cost-effective electron microscopy platform. Lower beam energies also have the potential to provide greater information from thin, light-element samples. Here, we demonstrate a sub-ångström resolution of 0.67 Å using a 20 keV SEM operated in transmission mode, enabled by ptychographic reconstruction. This resolution corresponds to a resolution-to-wavele

SUBMITTER: Blackburn AM 

PROVIDER: S-EPMC12521724 | biostudies-literature | 2025 Oct

REPOSITORIES: biostudies-literature