Batch fabrication of ultra-sharp atomic force microscope probes with stair-shaped handles for high-precision imaging.

ABSTRACT: Atomic force microscope (AFM) systems rely on silicon (Si) probes for precise nanoscale characterization across diverse environments. However, fabricating high-aspect-ratio (HAR) and sharp Si tips and optimizing the handle geometries remain significant challenges. Conventional HAR probe fabrication methods lack scalability, precision, and cost efficiency, while cuboid-shaped handles risk obstructing laser detection and limiting compatibility. This study presents an innovative batch-fabrication strategy for high-performance Si AFM probes that integrate ultra-sharp HAR tips, rectangular cantilevers, and universally compatible stair-shaped handles. Notably, the tip fabrication process employs only low-cost microscale ultraviolet (UV) lithography, while still achieving nanoscale structural res

SUBMITTER: Pan A 

PROVIDER: S-EPMC12537982 | biostudies-literature | 2025 Oct

REPOSITORIES: biostudies-literature