Ultra-High Sensitivity, Wide-Range Thermometry Based on High-Quality Microscale Diamond Resonators.

ABSTRACT: Next-generation thermometry requires ultrahigh temperature sensitivity, precision, and microscale or nanoscale spatial resolution for bio-calorimetry, optoelectronic sensing, quantum science, energy storage, and thermal management of electronic devices. Current thermometry approaches based on thermocouple, resistive, and optical mechanisms suffer from various problems such as large volume, low resolution, high noise level, and narrow temperature range. Microelectromechanical system (MEMS) resonators hold great potential as thermometry due to the small size, batch fabrication, and facile integration with electrical circuits. However, mainstream silicon MEMS thermometry struggles with the trade-off between responsivity, temperature resolution, and sensitivity. In this work, we utilize the hi

SUBMITTER: Zhao W 

PROVIDER: S-EPMC12548502 | biostudies-literature | 2025 Oct

REPOSITORIES: biostudies-literature