Superconductivity in transparent amorphous indium tin oxide films deposited by RF magnetron sputtering.

ABSTRACT: Integrating superconductivity with high optical transparency is critical for advancing quantum technologies, yet remains fundamentally challenging due to photon damping at conventional superconductor interfaces. Here, we report the integrated circuit process compatible and scalable fabrication of transparent superconducting tin-doped indium oxide (ITO) thin films by RF magnetron sputtering without post-treatment. Combining Aslamazov-Larkin fluctuation theory and Ginzburg-Landau analysis, a superconducting transition temperature T_c of 1.43 K and the zero-temperature coherence length of 18.14 nm are determined. The two-dimensional nature of superconductivity is corroborated by a Berezinskii-Kosterlitz-Thouless transition near 0.8 K. These ITO films exhibit high transmittance acros

SUBMITTER: Wang K 

PROVIDER: S-EPMC12552542 | biostudies-literature | 2025 Oct

REPOSITORIES: biostudies-literature