Impact of Strain in Free-Standing PtSe₂ in Scalable 2D MEMS.

ABSTRACT: 2D layered materials such as PtSe₂ are prime candidates for next-generation micro- and nano-electro-mechanical systems (MEMS/NEMS), including piezoresistive sensors. However, due to difficulties in large-scale synthesis and the inherent drawbacks associated with mechanical transfer of 2D material films, scalable NEMS production remains challenging. In this work, we report a fabrication route for free-standing, as-grown 2D material channels of PtSe₂ with controlled dimensions, avoiding a mechanical film transfer. The free-standing devices provide a universal platform for strain engineering of 2D materials because tension can be easily controlled by application of a back-contact voltage. Moreover, the piezoresistivity of PtSe₂, together with the possibility o

SUBMITTER: Heiserer S 

PROVIDER: S-EPMC12574633 | biostudies-literature | 2025 Oct

REPOSITORIES: biostudies-literature