Effect of Dry Oxidation on the Optical Response and Morphology of Mesoporous Hybrid Structures.

ABSTRACT: This work presents a detailed experimental and theoretical investigation of periodic and quasiperiodic hybrid photonic structures composed of porous silicon (PS) and thermally oxidized porous Si-SiO₂. Designed with a Fibonacci sequence and embedded between asymmetric Bragg mirrors, the structures were fabricated via electrochemical etching on p-type (100)-oriented silicon wafers with distinct doping levels (P⁺ and P⁺⁺). A two-step dry oxidation process (350 °C and 800 °C) was employed to stabilize the porous network and transform PS into a robust hybrid Si-SiO₂ matrix. SEM and EDS analyses revealed that wafer doping significantly affects morphology, oxide growth, and silicon retention, with P⁺-based structures maintaining smoother surf

SUBMITTER: Jimenez-Vivanco MR 

PROVIDER: S-EPMC12593027 | biostudies-literature | 2025 Nov

REPOSITORIES: biostudies-literature