Oxidation-Tuned CuO_<i>x</i> for Spin-Orbit Torque Efficiency Enhancement.

ABSTRACT: In this study, we demonstrate that oxidation-controlled CuO_x layers can serve as effective sources of orbital current for enhancing damping-like spin-orbit torque (SOT) in CoFeB/Pt heterostructures. By reactively sputtering CuO_x under varied oxygen concentrations, we systematically tuned its oxidation state and evaluated its impact on SOT efficiency through harmonic Hall voltage measurements. A peak damping-like SOT efficiency of |ξ_DL| ≈ 0.30 was achieved at Q = 4% with a CuO_x thickness of 3 nm and a Pt thickness of 4 nm, representing a ∼76% enhancement over the Pt-only control structure. SOT efficiency exhibited a nonmonotonic dependence on CuOx thickness, peaking at 3 m and then decreasing, suggesting limited propaga

SUBMITTER: Li CJ 

PROVIDER: S-EPMC12598702 | biostudies-literature | 2025 Nov

REPOSITORIES: biostudies-literature