Enhancing thin-film wafer inspection with a multi-sensor array and robot constraint maintenance.

ABSTRACT: Thin-film inspection on large-area substrates in coating manufacture remains a critical parameter to ensure product quality; however, extending the inspection process precisely over a large area presents major challenges, due to the limitations of the available inspection equipment. An additional manipulation problem arises when automating the inspection process, as the silicon wafer requires movement constraints to ensure accurate measurements and to prevent damage. Furthermore, there are other increasingly important large-area industrial applications, such as Roll-to-Roll (R2R) manufacturing, where coating thickness inspection introduces additional challenges. This paper presents an autonomous inspection system using a robotic manipulator with a novel learned constraint manifold to contr

SUBMITTER: Sanchez-Arriaga NE 

PROVIDER: S-EPMC12612131 | biostudies-literature | 2025 Nov

REPOSITORIES: biostudies-literature