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Mixed Co-Mn oxide coatings synthetized by DLI-MOCVD for SOC interconnect a parametric study for composition and homogeneity control.


ABSTRACT: The present study investigates the synthesis of mixed cobalt manganese oxide coating for Solid Oxide Cell (SOC) interconnect application using DLI-MOCVD (Direct Liquid Injection-Metal Oxide Chemical Vapor Deposition). The possibility to control the coating thickness and composition by injecting a mixed solution of Co(acac)3 and Mn(acac)3 precursors is demonstrated. Various oxide compositions from MnxCo1-xO to MnxCo3-xO4 are synthesized. An acceptable homogeneity in terms of thickness and composition is possible over 25 cm along a tubular reactor which makes this process suitable for industrial application.

SUBMITTER: Chanson R 

PROVIDER: S-EPMC12618656 | biostudies-literature | 2025 Nov

REPOSITORIES: biostudies-literature

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Mixed Co-Mn oxide coatings synthetized by DLI-MOCVD for SOC interconnect a parametric study for composition and homogeneity control.

Chanson R R   Miserque F F   Schuster F F   Rouillard F F  

Scientific reports 20251114 1


The present study investigates the synthesis of mixed cobalt manganese oxide coating for Solid Oxide Cell (SOC) interconnect application using DLI-MOCVD (Direct Liquid Injection-Metal Oxide Chemical Vapor Deposition). The possibility to control the coating thickness and composition by injecting a mixed solution of Co(acac)<sub>3</sub> and Mn(acac)<sub>3</sub> precursors is demonstrated. Various oxide compositions from Mn<sub>x</sub>Co<sub>1-x</sub>O to Mn<sub>x</sub>Co<sub>3-x</sub>O<sub>4</sub>  ...[more]

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