Low-pressure plasma cleaning of organic contamination from chemically coated surfaces: a study combining experimental and molecular dynamics studies.

ABSTRACT: During prolonged service in vacuum-based intense laser systems, the surface chemical coatings of large-aperture optical components inevitably suffer from organic contamination, leading to irreversible damage to the surface chemical coatings and a rapid degradation of the optical performance under laser irradiation. This study uses experiments and simulations to examine the process and microscopic mechanisms associated with the removal of organic contaminants from surface chemical coatings through low-pressure plasma cleaning. Firstly, a capacitive-coupling discharge model for the low-pressure plasma cleaning device was constructed through finite element simulations to obtain the spatial distribution of plasma discharge characteristics. Langmuir probe and emission spectrometer experiments w

SUBMITTER: Wang Z 

PROVIDER: S-EPMC12624504 | biostudies-literature | 2025 Nov

REPOSITORIES: biostudies-literature