High inductance density in CMOS-compatible magnetically integrated 3D microinductors for radio-frequency applications.

ABSTRACT: On-chip inductors enable high integration in radio-frequency electronics, critical for compact, power-efficient systems. However, they often occupy a large chip area due to low inductance density (D, defined as the total inductance per unit area) that scales sublinearly with conductor length (l) in planar architectures. Here, we present a three-dimensional rolled-up, magnetically integrated microinductor technology with record-high inductance density. By exploiting a superlinear scaling law (D ∝ l^2.4) via 3D winding with magnetic thin films, our devices achieve 8333 nH/mm² at 0.55 GHz-over two orders of magnitude higher than conventional planar inductors. This breakthrough stems from a 3D geometry in which strained layers confine multiple turns in a compact tubular volume, inten

SUBMITTER: Chen L 

PROVIDER: S-EPMC12627096 | biostudies-literature | 2025 Nov

REPOSITORIES: biostudies-literature