Interface identification in micro-LED repair applications via depth profiling using femtosecond laser-induced breakdown spectroscopy.

ABSTRACT: The commercialization of micro light-emitting diode (micro-LED) display technology depends on the efficient transfer of millions of individual micro-LEDs onto display panels with high spatial precision and yield. However, the extremely high pixel density in 4 K and 8 K displays poses a significant challenge for defect-free transfer. To maintain display quality and ensure production viability, it is crucial to develop effective strategies for repairing defective chips. While conventional laser-based repair methods have been widely used, they often fall short due to the lack of real-time monitoring capability, making it difficult to precisely control ablation depth without causing unintended damage to adjacent structures. In this study, femtosecond laser-induced breakdown spectroscopy (fs-LI

SUBMITTER: Jung W 

PROVIDER: S-EPMC12630935 | biostudies-literature | 2025 Nov

REPOSITORIES: biostudies-literature