Universal 3D-Printing of Suspended Metal Oxide Nanowire Arrays on MEMS for AI-Optimized Combinatorial Gas Fingerprinting.
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ABSTRACT: Additive manufacturing technology has the potential to provide great versatility in the design and fabrication of sensing devices. This prerequisite necessitates further technological improvement in precision and material diversity. Here, a universal meniscus-guided 3D printing method is reported that can fabricate freestanding metal oxide semiconducting nanowires with programmed compositions and compatible substrate options at the single-entity level. By studying printing process and ink compositions, polycrystalline metal oxide (MOX) nanowires with controlled shapes and tunable diameters down to 180 nm are achieved. The method enables a high-precision, mask-free printing of MOXs nanowire arches array on a 1.5 µm thick suspended membrane, paving the way for integrating a micro-electromech
SUBMITTER: Liu Y
PROVIDER: S-EPMC12631845 | biostudies-literature | 2025 Nov
REPOSITORIES: biostudies-literature
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