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Direct access to the graphene-metal interface using Raman spectroscopy to study the origin of contact resistance in operational devices.


ABSTRACT: We present and validate a reliable approach for investigating the graphene-metal interface in the top metallic contacts of operational devices using Raman spectroscopy. A transparent substrate was optimized for graphene visualization and processing by adjusting the thickness of aluminum and amorphous silicon nitride on a glass substrate. After graphene photolithography and Cr/Au contact fabrication, the device was flipped upside down to directly expose the graphene-metal interface for Raman analysis using 457 nm excitation. Electrical characterization was performed on the same devices: the sheet resistance was measured using the van der Pauw method, and the contact resistance was determined using the transfer length method. This approach enables direct correlation between Raman features-an

SUBMITTER: Kovtun A 

PROVIDER: S-EPMC12637212 | biostudies-literature | 2025 Dec

REPOSITORIES: biostudies-literature