Rapid Fabrication of Large-Area Anti-Reflective Microholes Using MHz Burst Mode Femtosecond Laser Bessel Beams.

ABSTRACT: Femtosecond laser has been widely utilized in functional microstructural surfaces for applications such as anti-reflection, radiative cooling, and self-cleaning. However, achieving high-efficiency manufacturing of high-consistency functional microstructures (with feature sizes ~1 μm) over large areas remains a challenge. Here, we report a femtosecond laser temporal and spatial modulation technique for fabricating large-area anti-reflective microholes on magnesium fluoride (MgF₂) windows. The beam was transformed into a Bessel beam to extend the Rayleigh length, enabling the fabrication of microhole arrays with sub-micron precision and surface roughness variations within 10 nm over a 6 μm focal position shift range (5-11 μm). By modulating MHz burst pulses, the aspect ratio of th

SUBMITTER: Ding Y 

PROVIDER: S-EPMC12655269 | biostudies-literature | 2025 Nov

REPOSITORIES: biostudies-literature