The Suppression of Spurious Modes in TC-SAW Resonators by the Application of Bent Metal Strips.

ABSTRACT: This article investigates the use of bent metal strips on the top of a SiO₂ layer for the suppression of spurious modes in temperature-compensated surface acoustic wave (TC-SAW) resonators employing a SiO₂/Cu/128°YX-LiNbO₃ structure. The proposed metal strip method includes two parts: a primary metal strip located at the edge of the interdigital transducer (IDT) aperture region and a secondary metal strip in the gap region. The impact of the geometric parameters of bent metal strips was calculated by the 3D finite element method (FEM), and theoretical simulation results show that this method can effectively suppress the transverse modes and mitigate the gap modes originating from the gap region in conventional TC-SAW resonators. Furthermore, experimental va

SUBMITTER: Li M 

PROVIDER: S-EPMC12655950 | biostudies-literature | 2025 Nov

REPOSITORIES: biostudies-literature