Rotating compensator spectroscopic ellipsometry based on frequency division multiplexing with retardation calibration.

ABSTRACT: Spectroscopic ellipsometry (SE) is widely used to obtain valuable information about materials such as optical constants or film thickness in a non-destructive way. Various types of SE, each possessing distinct characteristics, have been studied for specific applications. Here, we theoretically and experimentally demonstrate Frequency Division Multiplexing Rotating Compensator Spectroscopic Ellipsometry (FDM-RCSE) by using the frequency division multiplexing (FDM) technique and a rotating compensator with retardation calibration. By utilizing lasers with multiple wavelengths and a spectrally integrating detector, FDM-RCSE enables the simultaneous measurement of three ellipsometry transfer quantities (ETQ) of materials at multiple wavelengths without the need for spectroscopy or switching be

SUBMITTER: Park J 

PROVIDER: S-EPMC12660306 | biostudies-literature | 2025 Nov

REPOSITORIES: biostudies-literature