A ceramic-based ITON piezoresistive pressure sensor with wide temperature range (RT-900 °C) and broad frequency response.

ABSTRACT: Piezoresistive pressure sensors offer high accuracy, high sensitivity, and a compact form factor, making them widely adopted in aerospace applications. However, conventional designs are constrained by sensing materials and structural limitations, hindering pressure monitoring at temperatures exceeding 600 °C. Stable and repeatable pressure measurement over a wide temperature and frequency range remains a significant challenge. In this work, a ceramic-based nitrogen-doped ITO (ITON) piezoresistive pressure sensor is proposed. By utilizing an Al₂O₃ ceramic structure and ITO material, the issue of operational temperature limitations is effectively addressed, thereby enabling stable sensor output at high temperatures. Results show that the sensitivity of the sensor reache

SUBMITTER: Wang H 

PROVIDER: S-EPMC12717217 | biostudies-literature | 2025 Dec

REPOSITORIES: biostudies-literature