Fabrication of Nanostructures on Surface of Micro-Lens Arrays Using Reactive Ion Etching.

ABSTRACT: In this study, we fabricated a nanostructure on the surface of the micro-lens array (MLA), which is one of the light extraction technologies of organic light-emitting diodes (OLEDs), by performing the Reactive Ion -Etching (RIE) process. The MLA consists of a lensed area and a lens-less bottom (flat film area). We performed a systematic analysis to find ways to improve the light extraction efficiency of the MLA surface and flat film area. By controlling the RIE process time and type of gas plasma, nanostructures were formed on the surface of the MLA. O₂ and CF₄ gas plasmas resulted in nanostructures with tall heights and high aspect ratios, whereas CHF₃ and Ar gas plasmas resulted in nanostructures with small heights and low aspect ratios. Furthermore, it w

SUBMITTER: Hwang TJ 

PROVIDER: S-EPMC12734499 | biostudies-literature | 2025 Nov

REPOSITORIES: biostudies-literature