Piezoelectrically actuated silicon-nitride-based high-speed spatial light modulator.

ABSTRACT: Advancements in light modulator technology have been driving discoveries and progress across various fields. The problem of large-scale coherent optical control of atomic quantum systems-including cold atoms, ions, and solid-state color centers-presents among the most stringent requirements. This motivates a new generation of high-speed large-scale modulator technology operating in the visible to near-infrared wavelength range. We introduce a scalable modulator technology based on piezoelectrically actuated silicon nitride resonant waveguide gratings fabricated on 200 mm diameter silicon wafers with CMOS-compatible processes. We present a proof-of-concept device with 4 × 4 individually addressable 50 μm × 50 μm pixels or channels, each containing a resonant waveguide grating with a  ~ 780 

SUBMITTER: Vanackere T 

PROVIDER: S-EPMC12749027 | biostudies-literature | 2025 Nov

REPOSITORIES: biostudies-literature