Quasi-anisotropic wet etching of glass creates inclined microstructures for advanced optical and MEMS devices.

ABSTRACT: Glass is one of the most widely used functional materials in various fields, thus developing high-precision, on-demand and low-cost glass microstructuring technologies is essential for both academic and industry. Although numerous technological advancements in the past, it is still a challenge to fabricate microstructures with smooth inclined sidewalls on glass substrates, posing difficulties in fulfilling the advantages of glass material for many emerging applications, including optics and MEMS. In this paper, we establish a novel quasi-anisotropic wet etching strategy that expands the ability of glass micromachining and enables tunable inclined surface fabrication with high quality and low cost. By exploring the competitive effects of the etching induced by interface between glass and th

SUBMITTER: Yu J 

PROVIDER: S-EPMC12780284 | biostudies-literature | 2026 Jan

REPOSITORIES: biostudies-literature