CMOS-Compatible ZrO₂-Based Film for Photoplethysmography Sensors Enabling Accurate and Sensitive Health Monitoring.

ABSTRACT: Photoplethysmography (PPG) is a simple noninvasive technique for the detection of multiple cardiovascular parameters, such as heart rate, blood oxygen saturation (SpO₂), systolic blood pressure, and diastolic blood pressure. However, the current commercial PPG technology is limited by several factors, including rigidity, bulkiness, high cost, high power consumption of ∼10's mW, poor operational stability under ambient conditions, and susceptibility to motion artifacts. In this work, we overcome many of these limitations using a novel self-powered, miniaturized, low-cost, stable PPG sensor based on a simple CMOS-compatible fluorite-type ferro/pyroelectric Hf_xZr_1-xO₂ thin-film photodetector device. Our novel self-powered photodetector

SUBMITTER: Estrocio N 

PROVIDER: S-EPMC12818714 | biostudies-literature | 2026 Jan

REPOSITORIES: biostudies-literature