High-efficiency femtosecond laser fabrication of graphene-hybrid planar micro-supercapacitors with micro/nanostructured electrodes.

ABSTRACT: The integration of surface-regular micro/nanostructured electrodes within a limited footprint area is promising to enhance the electrochemical performance of planar micro-supercapacitors (P-MSCs), while developing simple yet efficient manufacturing methods for such electrodes remains a challenge. Here, we propose a universal strategy combining femtosecond laser plasma lithography with spatial light modulation (SLM-FPL), fabricating well-ordered sub-wavelength micro/nanostructured electrodes of interdigital P-MSCs (SEP-MSCs) on graphene oxide (GO) films. Achieving 500/50 µm finger widths/spacings and 680 nm internal grating periods, this method enables device densities >25 units inch^-2 with processing efficiency orders of magnitude higher than conventional laser direct writing. F

SUBMITTER: Zhang Y 

PROVIDER: S-EPMC12819388 | biostudies-literature | 2026 Jan

REPOSITORIES: biostudies-literature