Low resistance p-type contacts to monolayer WSe₂ through chlorinated solvent doping.

ABSTRACT: Tungsten diselenide (WSe₂) is a promising p-type semiconductor limited by high contact resistance (R_C) and the lack of a reliable doping strategy. Here, we demonstrate that exposing WSe₂ to chloroform provides simple and stable p-type doping. In monolayer WSe₂ transistors with Pd contacts, chloroform increases the maximum hole current by over 100× (>200 µA/µm), reduces R_C to ~ 2.5 kΩ·μm, and retains an on/off ratio of 10¹⁰ at room temperature. These improvements persist for over 8 months, survive a 150 °C thermal anneal, and remain effective down to 10 K, enabling a cryogenic R_C of ~ 1 kΩ·μm. Density functional theory indicates that chloroform strongly physisorbs to WSe₂, inducing hole doping with minim

SUBMITTER: Hoang L 

PROVIDER: S-EPMC12820234 | biostudies-literature | 2026 Jan

REPOSITORIES: biostudies-literature