Atomic Layer Deposition of Aluminum Phosphorus Oxynitride and Its Application as a Passivation Layer on Aluminum Metal Anode.

ABSTRACT: Aqueous aluminum (Al) batteries are an attractive energy storage technology due to the high theoretical capacity of Al, low reduction potential, low cost, and environmental friendliness. However, the practical application of aqueous Al batteries has been hindered by aggressive parasitic reactions, such as Al corrosion, at the Al and aqueous electrolyte interface. For the first time, this work developed aluminum phosphorus oxynitride (AlPON) by plasma-enhanced atomic layer deposition (PEALD) and applied it to suppress side reactions at the Al and electrolyte interface. The AlPON is obtained by PEALD in a temperature range of 100-180 °C using trimethylaluminum, water, tris(dimethylamino)phosphine, and plasma oxygen as precursors. It is noteworthy that the doubly and triply valent N environme

SUBMITTER: Tao L 

PROVIDER: S-EPMC12824563 | biostudies-literature | 2026 Jan

REPOSITORIES: biostudies-literature