Ultra-Sensitive Dual-Resonator Graphene Pressure Sensor with Temperature Self-Compensation.

ABSTRACT: Silicon resonator sensors have limitations in detecting small pressure changes due to their structural dimensions. Graphene nanomechanical resonators, with their ultra-small thickness and excellent mechanical properties, offer the opportunity to break this limitation. Here, a highly sensitive graphene nanomechanical pressure sensor with integrated temperature self-compensation is reported. It consists of two vacuum anode-bonded graphene resonators: one is sensitive to pressure and temperature while the other to temperature only, allowing for the cancellation of thermal effects via detecting the difference in the resonant frequencies. A sensitivity of 24.1 kHz kPa^-1 is achieved over the pressure range of 0.001 to 500 kPa, 68 times higher than the state-of-the-art silicon pressure

SUBMITTER: Wan Z 

PROVIDER: S-EPMC12850379 | biostudies-literature | 2026 Jan

REPOSITORIES: biostudies-literature