Epitaxial growth of wafer-scale 2D superconductor single crystals by metal-organic chemical vapor deposition.

ABSTRACT: Metallic two-dimensional (2D) transition metal dichalcogenides (TMDCs) are garnering significant attention for their ability to enhance device performance when used as 2D contacts with semiconducting 2D materials, as well as for their intriguing low-temperature properties, including superconductivity, magnetism, and charge density waves (CDWs). However, the advancement of both fundamental studies and practical applications has been hindered by challenges in synthesizing high-quality, large-area materials. In this work, we report the epitaxial growth of wafer-scale 2D superconducting TMDC single-crystal multilayers by metal-organic chemical vapor deposition (MOCVD). Our NbS₂ multilayer films achieve high wafer-scale uniformity and single crystallinity of 2H phase, as confirmed by

SUBMITTER: Wang Z 

PROVIDER: S-EPMC12855184 | biostudies-literature | 2025 Dec

REPOSITORIES: biostudies-literature