Co-field-reconciled direct growth of 6-inch monolayer graphene.

ABSTRACT: The transfer-free synthesis of inch-scale high-quality graphene on insulators is of paramount importance for emerging electronic and optoelectronic applications. Nevertheless, recent efforts at direct growth via the chemical-vapor-deposition route failed to produce monolayer graphene with a large wafer size (i.e. 6 inches) affording scalable uniformity and batch repeatability. Here, we report a co-field-reconciled synthetic strategy in which the synergistic optimization of thermal and gas-flow fields readily allows the uniform growth of 6-inch monolayer graphene over a sapphire wafer with batch-production capability. The temperature and flow fields are dictated via the concurrent deployment of a graphite gasket and a gas distributor plate, with the effectiveness evidenced by simulation and

SUBMITTER: Liu F 

PROVIDER: S-EPMC12866660 | biostudies-literature | 2026 Feb

REPOSITORIES: biostudies-literature