Dataset Information
Annealing and passivation study of germanium on silicon (GOS) mid-infrared waveguide for sensing applications.
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ABSTRACT:
SUBMITTER: Ang RCF
PROVIDER: S-EPMC12917015 | biostudies-literature | 2026 Feb
REPOSITORIES: biostudies-literature
Publications
Annealing and passivation study of germanium on silicon (GOS) mid-infrared waveguide for sensing applications.
Scientific reports 20260202 1
Germanium on silicon (GOS) is an excellent platform for non-dispersive infrared sensing (NDIR) due to its broad mid-infrared (mid-IR) transparency. However, its optical waveguide propagation loss as a photonic sensing medium and its susceptibility to oxidation are concerns to be addressed. Herein, we study the effect of annealing GOS waveguide devices under forming gas and passivation using atomic layer deposition (ALD) of aluminum oxide (Al2O3) and aluminum nitride (AlN) on waveguide loss. Our ...[more]