Reactive Oxygen Ion Beam-Induced Deposition for Concurrent Purification of Platinum Nanostructures.

ABSTRACT: Oxygen-focused ion beam induced deposition (O-FIBID) enables the direct-write fabrication of Pt nanostructures while simultaneously enhancing purity concurrently through reactive oxygen-deposit interactions. By systematically varying the dwell time, accelerating voltage, and precursor pressure, the Pt content and conductivity can be controlled. Under optimum conditions, the Pt content reached 63 at.%. Across the dwell-time range used for resistivity measurements, the Pt content increased from 20 to 33 at.%, while the resistivity decreased from 2.9 × 10⁴ μΩ·cm to 1.2 × 10³ μΩ·cm, which is consistent with enhanced percolation through Pt grains and the lower intrinsic resistivity of the purer Pt deposit. The simulation results support a purification mechanism driven by t

SUBMITTER: Sprecker K 

PROVIDER: S-EPMC12943533 | biostudies-literature | 2026 Feb

REPOSITORIES: biostudies-literature