Photolithographic fabrication of microapertures with well-defined, three-dimensional geometries for suspended lipid membrane studies.

ABSTRACT: Robust and high-density biosensors incorporating suspended lipid membranes require microfabricated apertures that can be readily integrated into complex analysis systems. Apertures with well-defined, three-dimensional geometries enable the formation of suspended lipid membranes and facilitate reduced aperture size compared to vertical-walled apertures. Unfortunately, existing methods of producing apertures with well-defined, three-dimensional geometries are based on complex and expensive fabrication procedures, some of which yield apertures in excessively fragile thin-film materials. Here, we describe a microfabrication method utilizing incline and rotate lithography that achieves sloped-wall microapertures in SU-8 polymer substrates with precision control of the aperture diameter, substra

SUBMITTER: Baker CA 

PROVIDER: S-EPMC3822043 | biostudies-literature | 2013 Oct

REPOSITORIES: biostudies-literature