Transport spectroscopy of coupled donors in silicon nano-transistors.

ABSTRACT: The impact of dopant atoms in transistor functionality has significantly changed over the past few decades. In downscaled transistors, discrete dopants with uncontrolled positions and number induce fluctuations in device operation. On the other hand, by gaining access to tunneling through individual dopants, a new type of devices is developed: dopant-atom-based transistors. So far, most studies report transport through dopants randomly located in the channel. However, for practical applications, it is critical to control the location of the donors with simple techniques. Here, we fabricate silicon transistors with selectively nanoscale-doped channels using nano-lithography and thermal-diffusion doping processes. Coupled phosphorus donors form a quantum dot with the ground state split into

SUBMITTER: Moraru D 

PROVIDER: S-EPMC4147367 | biostudies-literature | 2014 Aug

REPOSITORIES: biostudies-literature