Self-induced parametric amplification arising from nonlinear elastic coupling in a micromechanical resonating disk gyroscope.

ABSTRACT: Parametric amplification, resulting from intentionally varying a parameter in a resonator at twice its resonant frequency, has been successfully employed to increase the sensitivity of many micro- and nano-scale sensors. Here, we introduce the concept of self-induced parametric amplification, which arises naturally from nonlinear elastic coupling between the degenerate vibration modes in a micromechanical disk-resonator, and is not externally applied. The device functions as a gyroscope wherein angular rotation is detected from Coriolis coupling of elastic vibration energy from a driven vibration mode into a second degenerate sensing mode. While nonlinear elasticity in silicon resonators is extremely weak, in this high quality-factor device, ppm-level nonlinear elastic effects result in an

SUBMITTER: Nitzan SH 

PROVIDER: S-EPMC4356982 | biostudies-literature | 2015 Mar

REPOSITORIES: biostudies-literature