Multilayer block copolymer meshes by orthogonal self-assembly.

ABSTRACT: Continued scaling-down of lithographic-pattern feature sizes has brought templated self-assembly of block copolymers (BCPs) into the forefront of nanofabrication research. Technologies now exist that facilitate significant control over otherwise unorganized assembly of BCP microdomains to form both long-range and locally complex monolayer patterns. In contrast, the extension of this control into multilayers or 3D structures of BCP microdomains remains limited, despite the possible technological applications in next-generation devices. Here, we develop and analyse an orthogonal self-assembly method in which multiple layers of distinct-molecular-weight BCPs naturally produce nanomesh structures of cylindrical microdomains without requiring layer-by-layer alignment or high-resolution lithogra

SUBMITTER: Tavakkoli K G A 

PROVIDER: S-EPMC4736107 | biostudies-literature | 2016 Jan

REPOSITORIES: biostudies-literature