3D Stretchable Arch Ribbon Array Fabricated via Grayscale Lithography.

ABSTRACT: Microstructures with flexible and stretchable properties display tremendous potential applications including integrated systems, wearable devices and bio-sensor electronics. Hence, it is essential to develop an effective method for fabricating curvilinear and flexural microstructures. Despite significant advances in 2D stretchable inorganic structures, large scale fabrication of unique 3D microstructures at a low cost remains challenging. Here, we demonstrate that the 3D microstructures can be achieved by grayscale lithography to produce a curved photoresist (PR) template, where the PR acts as sacrificial layer to form wavelike arched structures. Using plasma-enhanced chemical vapor deposition (PECVD) process at low temperature, the curved PR topography can be transferred to the silicon di

SUBMITTER: Pang Y 

PROVIDER: S-EPMC4921820 | biostudies-literature | 2016 Jun

REPOSITORIES: biostudies-literature