Transfer of motion through a microelectromechanical linkage at nanometer and microradian scales.

ABSTRACT: Mechanical linkages are fundamentally important for the transfer of motion through assemblies of parts to perform work. Whereas their behavior in macroscale systems is well understood, there are open questions regarding the performance and reliability of linkages with moving parts in contact within microscale systems. Measurement challenges impede experimental studies to answer such questions. In this study, we develop a novel combination of optical microscopy methods that enable the first quantitative measurements at nanometer and microradian scales of the transfer of motion through a microelectromechanical linkage. We track surface features and fluorescent nanoparticles as optical indicators of the motion of the underlying parts of the microsystem. Empirical models allow precise characte

SUBMITTER: Copeland CR 

PROVIDER: S-EPMC5103322 | biostudies-literature | 2016

REPOSITORIES: biostudies-literature