Sequential shape-and-solder-directed self-assembly of functional microsystems.

ABSTRACT: We demonstrate the fabrication of packaged microsystems that contain active semiconductor devices and passive components by using a directed self-assembly technique. The directed self-assembly is accomplished by combining geometrical shape recognition with site-specific binding involving liquid solder. Microfabricated components with matching complementary shapes, circuits, and liquid solder-coated areas were suspended in ethylene glycol and agitated by using a turbulent liquid flow to initiate the self-assembly. Microsystems were obtained by sequentially adding components of different types. Six hundred AlGaInP/GaAs light-emitting diode segments with a chip size of 200 microm were assembled onto device carriers with a yield of 100% in 2 min. Packaged light-emitting diodes formed with yiel

SUBMITTER: Zheng W 

PROVIDER: S-EPMC516478 | biostudies-literature | 2004 Aug

REPOSITORIES: biostudies-literature