Noninvasive Scanning Raman Spectroscopy and Tomography for Graphene Membrane Characterization.

ABSTRACT: Graphene has extraordinary mechanical and electronic properties, making it a promising material for membrane-based nanoelectromechanical systems (NEMS). Here, chemical-vapor-deposited graphene is transferred onto target substrates to suspend it over cavities and trenches for pressure-sensor applications. The development of such devices requires suitable metrology methods, i.e., large-scale characterization techniques, to confirm and analyze successful graphene transfer with intact suspended graphene membranes. We propose fast and noninvasive Raman spectroscopy mapping to distinguish between free-standing and substrate-supported graphene, utilizing the different strain and doping levels. The technique is expanded to combine two-dimensional area scans with cross-sectional Raman spectroscopy,

SUBMITTER: Wagner S 

PROVIDER: S-EPMC5345116 | biostudies-literature | 2017 Mar

REPOSITORIES: biostudies-literature