Strongly Enhanced Piezoelectric Response in Lead Zirconate Titanate Films with Vertically Aligned Columnar Grains.

ABSTRACT: Pb(Zr_0.52Ti_0.48)O₃ (PZT) films with (001) orientation were deposited on Pt(111)/Ti/SiO₂/Si(100) substrates using pulsed laser deposition. Variation of the laser pulse rate during the deposition of the PZT films was found to play a key role in the control of the microstructure and to change strongly the piezoelectric response of the thin film. The film deposited at low pulse rate has a denser columnar microstructure, which improves the transverse piezoelectric coefficient (d_31f) and ferroelectric remanent polarization (P_r), whereas the less densely packed columnar grains in the film deposited at high pulse rates give rise to a significantly higher longitudinal piezoelectric coefficient (d_33f) value. The effect of f

SUBMITTER: Nguyen MD 

PROVIDER: S-EPMC5364435 | biostudies-literature | 2017 Mar

REPOSITORIES: biostudies-literature